Hot Tel:

+86-531-88752665

ECO
  • Title: SiH4/MS
  • Column: Electronic Specialty Gas Series
  • CAS: 7803-62-5
  • Formula: H4Si
  • Weight: 232-263-4
Product Details


○ Name: Silane

○ Purity: 6N

○ Annual Capacity: 5,000 tons

○ Features: High purity, precise delivery, stable performance, an irreplaceable core gas for semiconductor and display industries.

○ Applications: Used for chemical vapor deposition, solar cells, display panels, IC thin film preparation, etc.

○ Fields: semiconductors, display panels , solar cells,silicon-carbon anode materials


QUALITY CONTROL INDICATORS


Testing ItemsUnitIndicatorAnalytic Method
SiH4
Vol%≥99.9999
H2ppm(v/v)
<20.0GC
O2+Ar<0.05
N2<0.5
CCH4<0.05
2-C4<0.1
CO<0.05
CO2<0.05
Chlorsilane<0.1
Si2H6<0.3
H2O<0.5Electrolysis



HEAVY METAL AND OTHER ELEMENT INDICATORS

Testing ItemsUnitIndicatorAnalytic Method
Alppb
<0.2ICP-MS
Sb<0.2
As<0.2
B<0.2
Ga<0.2
P<0.2
Cr+Cu+Fe+Ni+Zn<1.0