○ Name: Silane
○ Purity: 6N
○ Annual Capacity: 5,000 tons
○ Features: High purity, precise delivery, stable performance, an irreplaceable core gas for semiconductor and display industries.
○ Applications: Used for chemical vapor deposition, solar cells, display panels, IC thin film preparation, etc.
○ Fields: semiconductors, display panels , solar cells,silicon-carbon anode materials
QUALITY CONTROL INDICATORS
| Testing Items | Unit | Indicator | Analytic Method |
| SiH4 | Vol% | ≥99.9999 | |
| H2 | ppm(v/v) | <20.0 | GC |
| O2+Ar | <0.05 | ||
| N2 | <0.5 | ||
| CCH4 | <0.05 | ||
| 2-C4 | <0.1 | ||
| CO | <0.05 | ||
| CO2 | <0.05 | ||
| Chlorsilane | <0.1 | ||
| Si2H6 | <0.3 | ||
| H2O | <0.5 | Electrolysis |
HEAVY METAL AND OTHER ELEMENT INDICATORS
| Testing Items | Unit | Indicator | Analytic Method |
| Al | ppb | <0.2 | ICP-MS |
| Sb | <0.2 | ||
| As | <0.2 | ||
| B | <0.2 | ||
| Ga | <0.2 | ||
| P | <0.2 | ||
| Cr+Cu+Fe+Ni+Zn | <1.0 |